The SEM-FIB Workbench
نویسندگان
چکیده
The Nanorobotics series developed by Klocke Nanotechnik extend Scanning Electron or Ion Microscopes to material processing systems. The included automation allows the whole field of handling, assembly and manufacturing like known from a normal desktop system – now with nano-precision, including various kinds of image generation by using different sensors. Applications are in the field of Material Research, Forensics, 3-Dimensional SEM/FIB, Tribology, Semiconductor, e-beam Lithography or X-Ray imaging up to complete NanoFabrication.
منابع مشابه
Comparison of different preparation methods of biological samples for FIB milling and SEM investigation.
When a new approach in microscopy is introduced, broad interest is attracted only when the sample preparation procedure is elaborated and the results compared with the outcome of the existing methods. In the work presented here we tested different preparation procedures for focused ion beam (FIB) milling and scanning electron microscopy (SEM) of biological samples. The digestive gland epitheliu...
متن کاملSurface damage induced by FIB milling and imaging of biological samples is controllable.
Focused ion beam (FIB) techniques are among the most important tools for the nanostructuring of surfaces. We used the FIB/SEM (scanning electron microscope) for milling and imaging of digestive gland cells. The aim of our study was to document the interactions of FIB with the surface of the biological sample during FIB investigation, to identify the classes of artifacts, and to test procedures ...
متن کاملFIB/SEM technology in NEMS/MEMS fabrication and investigation
FEI Helios NanoLab 600i microscope with Kleindiek MM3A-EM micromanipulators, controlled by microscope PC connected to Keithley 2400 Source Meter, has been used in our experiments. Due to limited space only several examples of FIB/SEM processes that have been conducted are presented here. They proof the great advantage of this technology in modifying single structures in short time. Streszczenie...
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Precise sample stage positioning plays an important role for various FIB (Focused Ion Beam) and SEM (scanning electron microscope) applications in microand nanotechnology. During the last few years, FIB instruments have become an indispensable tool for sample preparation, prototyping and micro-machining. Modern FIB devices are equipped with an additional electron column. Such combined SEM/FIB d...
متن کاملHuman cardiac telocytes: 3D imaging by FIB-SEM tomography
Telocyte (TC) is a newly identified type of cell in the cardiac interstitium (www.telocytes.com). TCs are described by classical transmission electron microscopy as cells with very thin and long telopodes (Tps; cellular prolongations) having podoms (dilations) and podomers (very thin segments). TCs' three-dimensional (3D) morphology is still unknown. Cardiac TCs seem to be particularly involved...
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